There have been at least 200 books written on various aspects of thin
film science and technology, but this is the first true textbook, specifically
intended for classroom use in universities. In my opinion there has been a
crying need for a real textbook for a long time. Most thin film courses in
universities have had to use many books written for relatively experienced
thin film scientists and engineers, often supplemented by notes prepared by
the course instructor. The Materials Science of Thin Films, a true textbook,
complete with problems after each chapter, is available to serve as a nucleus
for first courses in thin film science and technology.
In addition to his many years of experience teaching and advising
graduate students at Stevens Institute of Technology, Professor Ohring has
been the coordinator of an on-premises, M.S. degree program offered by
Stevens at the AT&T Bell Laboratories in Murray Hill and Whippany, New
Jersey. This ongoing cooperative program has produced over sixty M.S.
graduates to date. Several of these graduates have gone on to acquire Ph.D.
degrees. The combination of teaching, research, and industrial involvement
has provided Professor Ohring with a broad perspective of thin film science
and technology and tremendous insight into the needs of students entering
this exciting field. His insight and experience are quite evident in this
John L. Vossen (1991


Chapter 1 : A Review of Materials Science

Chapter 2 : Vacuum Science and Technology

Chapter 3 : Thin-Film Evaporation Processes

Chapter 4 : Discharges, Plasmas, and Ion-Surface Interactions

Chapter 5 : Plasma and Ion Beam Processing of Thin Films

Chapter 6 : Chemical Vapor Deposition

Chapter 7 : Substrate Surfaces and Thin-Film Nucleation

Chapter 8 : Epitaxy

Chapter 9 : Film Structure

Chapter 10 : Characterization of Thin Films and Surfaces

Chapter 11 : Interdiffusion, Reactions, and Transformations in Thin Films

Chapter 12 : Mechanical Properties of Thin Films


total pages: 794